We discuss the flip-chip mounting process of photodiodes and fiber sleeves on silicon substrates for highly integrated and hybrid quantum circuits for operation at cryogenic temperatures. The size of the gold stud bumps and flip-chip parameters were optimized. Moreover, to connect optical fibers to the photodiodes in an optimal position, the fiber sleeves were aligned with specially fabricated alignment circles before applying thermocompression with the flip-chip machine. The mounted photodiodes were tested at both room temperature and cryogenic temperature, and we find that mechanical imperfections of the sleeve-ferrule combination limit the overall alignment accuracy. The experimental results show that our flip-chip process is very reliable and promising for various optical and electrical applications and, thus, paves the way for fabrication of hybrid chips, multi-chip modules and chip-on-chip solutions, which are operated at cryogenic temperatures.

Experimental study on the quantization accuracy of the quantum anomalous Hall effect.