Automated Author Profile

Ryuichi Inaba

Mitsubishi Materials Corporation

Current S-Index

1.7

Sum of Dataset Indices for all datasets

Average Dataset Index per Dataset

1.7

Average Dataset Index per dataset

Total Datasets

1

Total datasets for this author

Average FAIR Score

69.2%

Average FAIR Score per dataset

Total Citations

0

Total citations to the author's datasets

Total Mentions

0

Total mentions of the author's datasets

S-Index Interpretation

S-Index Over Time

Cumulative Citations Over Time

Cumulative Mentions Over Time

Datasets

Electrodeposited copper film data

The five types of surface roughness of the electroplated copper films was measured using a white light interferometer (Ametek). Each electrodeposited copper film was obtained via constant-current electrolysis in copper sulfate bath. The concentrations of sulfuric acid (H2SO4) and copper sulfate (CuSO4) were in the ranges of 20–180 g/L and 140–220 g/L, respectively. Standard additives for copper sulfate bath (JCU, CU-BRITE_RF) and 50 ppm chloride ions were introduced into the bath to ensure the stable formation of the electrodeposited copper film. A 70 mm × 70 mm sized masked copper plate was used as the working electrode and a Ti-coated mesh was used as the counter electrode. The electrodeposition time was controlled such that the total capacity was 8.1 C/cm2.

Authors

  • Ryo Tamura ;
  • Ryuichi Inaba ;
  • Mami Watanabe ;
  • Yutaro Mori ;
  • Makoto Urushihara ;
  • Kenji Yamaguchi ;
  • Shoichi Matsuda
0 Citations0 Mentions69% FAIR1.7 Dataset Index
10.48505/nims.4473January 2024