Published on 23 September 2021
Dataset for "A graph-theoretic approach for spatial filtering and its impact on mixed-type spatial pattern recognition in wafer bin maps"
View DatasetEzzat, Aziz;Liu, Sheng;Hochbaum, Dorit;Ding, Yu
Description
This is the dataset used in the paper, Ezzat, Liu, Hochbaum, and Ding, 2021, “A graph-theoretic approach for spatial filtering and its impact on mixed-type spatial pattern recognition in wafer bin maps,” IEEE Transactions on Semiconductor Manufacturing, Vol. 34, pp. 194-206.
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Metrics Over Time
Publication Details
Subfield
Industrial and Manufacturing Engineering
Field
Engineering
Domain
Physical Sciences
Confidence Score
98%
Source
Open Alex