Data for: "Miniaturised structured illumination microscopy using two 3-axis MEMS micromirrors "

This dataset contains component characterisation and calibration data next to fluorescence microbead and cell images taken with a custom Microelectromechanical Systems (MEMS) structured illumination microscopy (SIM) system, providing underlying data for a manuscript titled "Miniaturised structured illumination microscopy using two 3-axis MEMS micromirrors". The dataset has 8 csv files containing the raw data of measurements taken on the MEMS device as well as on the overall imaging system. Additionally, all raw and super-resolution processed bead images and cell images used in the above mentioned are provided in .tiff format in sub folders. An overarching jupyter notebook in the main folder has details on data processing and the embedded data visualisation used in the manuscript.