Supplementary Information for "In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope"

Grünewald, Lukas;Chezganov, Dmitry;De Meyer, Robin;Orekhov, Andrey;Van Aert, Sandra;Bogaerts, Annemie;Bals, Sara;Verbeeck, Jo

Description

Supplementary information for the article"In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope"containing the videos of in-situ SEM imaging (mp4 files), raw data/images, and Jupyter notebooks (ipynb files) for data treatment and plots.Link to the publication: https://doi.org/10.1002/admt.202301632Link to the preprint: https://doi.org/10.48550/arXiv.2308.15123Explanation of the data files can be found in the Information.pdf file. The Videos folder contains the in-situ SEM image series mentioned in the paper.If there are any questions/bugs, feel free to contact me at the email given on ORCID.

Citations (0)

Mentions (0)

Metrics

Dataset Index

0.9

FAIR Score

79%

Citations

1

Mentions

0

Metrics Over Time

Publication Details

DOI

Publisher

Zenodo

License

Creative Commons Attribution 4.0 International

Assigned Domain

Subfield

Surfaces, Coatings and Films

Field

Materials Science

Domain

Physical Sciences

Confidence Score

94%

Source

Open Alex

Keywords

MicroplasmaPlasmaSEMESEMIn-situEDSSputteringMicrofabrication

Normalization Factors

FT

44.23

CTw

1.00

MTw

1.00