Published on 01 January 2019

Data for: Effects of Ultraviolet Wavelength and Intensity on AlGaN Thin Film Surfaces Irradiated Simultaneously with CF4 Plasma and Ultraviolet

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Kawakami, Retsuo

Description

No description available.

Citations (1)

Mentions (0)

Metrics

Dataset Index

2.0

FAIR Score

65%

Citations

1

Mentions

0

Metrics Over Time

Publication Details

DOI

Publisher

Mendeley

Assigned Domain

Subfield

Condensed Matter Physics

Field

Physics and Astronomy

Domain

Physical Sciences

Confidence Score

65%

Source

Open Alex

Keywords

Plasma Applications

Normalization Factors

FT

13.46

CTw

1.00

MTw

1.00