Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition

Helmersson, Ulf

Description

Ion energy measurement for selected ions at different voltages applied in the reversed pulse.

Citations (0)

Mentions (0)

Metrics

Dataset Index

0.4

FAIR Score

65%

Citations

0

Mentions

0

Metrics Over Time

Publication Details

DOI

Publisher

Mendeley

License

Creative Commons Attribution 4.0 International

Assigned Domain

Subfield

Computational Mechanics

Field

Engineering

Domain

Physical Sciences

Confidence Score

51%

Source

Scholar Data Model

Keywords

Plasma

Normalization Factors

FT

57.69

CTw

1.00

MTw

1.00