Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures

Errando-Herranz, Carlos;Takabayashi, Alain Yuji;Edinger, Pierre;Sattari, Hamed;B. Gylfason, Kristinn;Quack, Niels

Description

The following dataset summarizes key figures in reported photonic MEMS devices. The data was used to categorize devices, define and plot key figures of merit relevant to the field of photonic MEMS for scalable integrated circuits, as discussed in the invited review article "MEMS for Photonic Integrated Circuits".

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Mentions (0)

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Metrics

Dataset Index

1.4

FAIR Score

58%

Citations

Mentions

Metrics Over Time

Publication Details

DOI

10.21227/h2pe-4349

Publisher

IEEE DataPort

Assigned Domain

Subfield

Electrical and Electronic Engineering

Field

Engineering

Domain

Physical Sciences

Confidence Score

57%

Source

Scholar Data Model

Keywords

CommunicationsOther

Normalization Factors

13.46

CTw

1.00

MTw

1.00